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[IEEE 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 - Boston, MA, USA (30 April-2 May 2002)] 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) - Controlling lithographic imaging performance at sub-100 nm CD with optical measurements
Grodnensky, I., Enayati, S., Manka, J., Mizutani, S., Slonaker, S.Year:
2002
Language:
english
DOI:
10.1109/asmc.2002.1001566
File:
PDF, 333 KB
english, 2002