On The Mechanism of the Anisotropic Dissolution of Silicon...

On The Mechanism of the Anisotropic Dissolution of Silicon in Chlorine Containing Hydrofluoric Acid Solutions

Stapf, André, Nattrodt, Peter, Kroke, Edwin
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Volume:
165
Year:
2018
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/2.0061804jes
File:
PDF, 1.54 MB
english, 2018
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