Substrate Influence on the Mechanical and Tribological...

Advanced Engineering Forum 2015 / 6 Vol. 13

Substrate Influence on the Mechanical and Tribological Characteristics of Gold Thin Films for MEMS Applications

Merie, Violeta, Pustan, Marius, Bîrleanu, Corina, Negrea, Gavril, Belcin, Ovidiu
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Volume:
13
Language:
english
Journal:
Advanced Engineering Forum
DOI:
10.4028/www.scientific.net/AEF.13.59
Date:
June, 2015
File:
PDF, 2.11 MB
english, 2015
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