MEMS Magnetic Sensor with Bridge-Type Resonator and Magnetostrictive Thin Film
OKADA, NAOKI, SASABUCHI, TAKASHI, KOIKE, KUNIHIRO, MINETA, TAKASHIVolume:
101
Language:
english
Journal:
Electronics and Communications in Japan
DOI:
10.1002/ecj.12042
Date:
March, 2018
File:
PDF, 786 KB
english, 2018