Platinum gettering in silicon: precipitation of PtSi on diffusion induced dislocations and on SiP precipitates
Correia, A., Pichaud, B., Lhorte, A., Quoirin, J.B.Volume:
11
Language:
english
Journal:
Materials Science and Technology
DOI:
10.1080/17432847.1995.11945565
Date:
July, 1995
File:
PDF, 1.42 MB
english, 1995