![](/img/cover-not-exists.png)
[IEEE 2017 Second International Conference on Reliability Systems Engineering (ICRSE) - Beijing, China (2017.7.10-2017.7.12)] 2017 Second International Conference on Reliability Systems Engineering (ICRSE) - Research on MEMS failure modes and failure mechanisms
Zhang, Ming, Lu, Fengming, Shao, JiangYear:
2017
Language:
english
DOI:
10.1109/ICRSE.2017.8030761
File:
PDF, 12.64 MB
english, 2017