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[IEEE 2017 International Semiconductor Conference (CAS) - Sinaia (2017.10.11-2017.10.14)] 2017 International Semiconductor Conference (CAS) - An SU-8 micro-tweezer based on the chevron electro-thermal actuators with a large in-plane displacement
Voicu, R-C., Tibeica, C., Muller, R., Dinescu, A.Year:
2017
Language:
english
DOI:
10.1109/SMICND.2017.8101169
File:
PDF, 931 KB
english, 2017