[IEEE 2017 International Semiconductor Conference (CAS) - Sinaia (2017.10.11-2017.10.14)] 2017 International Semiconductor Conference (CAS) - Effect of temperature treatments in different atmospheres on the crystallographic orientation and sheet resistance of Pt/Ti films on silicon
Muscalu, George, Romanitan, Cosmin, Bita, Bogdan, Dinulescu, Silviu, Anghelescu, Adrian, Moldovan, CarmenYear:
2017
Language:
english
DOI:
10.1109/SMICND.2017.8101224
File:
PDF, 511 KB
english, 2017