[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium
Yamazaki, Hiroaki, Hayashi, Yumi, Masunishi, Kei, Ono, Daiki, Ikehashi, TamioYear:
2017
Language:
english
DOI:
10.1109/TRANSDUCERS.2017.7994029
File:
PDF, 1.57 MB
english, 2017