[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - A qualitative technique to study stability and dynamics of micro-machined inductive contactless suspensions
Poletkin, Kirill V., Lu, Zhiqiu, Wallrabe, Ulrike, Korvink, Jan G., Badilita, VladYear:
2017
Language:
english
DOI:
10.1109/TRANSDUCERS.2017.7994102
File:
PDF, 1.01 MB
english, 2017