[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung, Taiwan (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - A pure-twisting piezoelectric actuator for tilting micromirror applications
Grinberg, Inbar, Maccabi, Nadav, Elata, DavidYear:
2017
Language:
english
DOI:
10.1109/TRANSDUCERS.2017.7994472
File:
PDF, 989 KB
english, 2017