Effect of a Trap Zone in Reducing Nanoparticle...

IEEE Transactions on Semiconductor Manufacturing 2018 / 2 Vol. 31; Iss. 1

Effect of a Trap Zone in Reducing Nanoparticle Contamination of Wafers and Photomasks in Parallel Airflowp

Woo, Sang-Hee, Lee, Jungsuk, Yook, Se-Jin
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Volume:
31
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2017.2759091
Date:
February, 2018
File:
PDF, 1.53 MB
english, 2018
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