Direct fabrication of diffraction grating onto organic...

Japanese Journal of Applied Physics 2018 / 03 Vol. 57; Iss. 3S2

Direct fabrication of diffraction grating onto organic single crystals by electron beam lithography

Kawata, Yoshihiro, Aoki, Kazuki, Inada, Yuhi, Yamao, Takeshi, Hotta, Shu
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Volume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.03EH11
Date:
March, 2018
File:
PDF, 1.70 MB
english, 2018
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