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Microsystem Technologies 2018 / 2

Structure design and test of MEMS thermocouple infrared detector

Lian-min, Cao, Ya-zhu, Zhang, Shi-jiao, Sun, Hui, Guo, Zhen, Zhang
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-3809-2
Date:
February, 2018
File:
PDF, 1.52 MB
english, 2018
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