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Fast and accurate: high-speed metrological large range AFM for surface and nanometrology
Dai, Gaoliang, Koenders, Ludger, Fluegge, Jens, Hemmleb, MatthiasLanguage:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/1361-6501/aaaf8a
Date:
February, 2018
File:
PDF, 1.18 MB
english, 2018