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[IEEE 2017 Devices for Integrated Circuit (DevIC) - Kalyani, India (2017.3.23-2017.3.24)] 2017 Devices for Integrated Circuit (DevIC) - Structural design and optimization of MEMS based capacitive accelerometer
Sanyal, Keya, Biswas, KalyanYear:
2017
Language:
english
DOI:
10.1109/DEVIC.2017.8073955
File:
PDF, 1.31 MB
english, 2017