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[IEEE 2017 22nd Microoptics Conference (MOC) - Tokyo (2017.11.19-2017.11.22)] 2017 22nd Microoptics Conference (MOC) - Non-destructive inspection of semiconductor optical waveguide using optical coherence tomography with visible broadband light source
Ishida, Kazumasa, Ozaki, Nobuhiko, Ikeda, Naoki, Sugimoto, YoshimasaYear:
2017
Language:
english
DOI:
10.23919/MOC.2017.8244576
File:
PDF, 465 KB
english, 2017