A Hydrogen Plasma Treatment for Soft and Selective Silicon...

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physica status solidi (a) 2018 / 03

A Hydrogen Plasma Treatment for Soft and Selective Silicon Nitride Etching

Bouchilaoun, Meriem, Soltani, Ali, Chakroun, Ahmed, Jaouad, Abdelatif, Darnon, Maxime, Boone, François, Maher, Hassan
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Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201700658
Date:
March, 2018
File:
PDF, 1.00 MB
english, 2018
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