[IEEE 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium ((EFTF/IFC) - BESANÇON, France (2017.7.9-2017.7.13)] 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFC) - DRIE of high Q-factor length-extensional mode quartz micro-resonator
Chapellier, Paul, Verlhac, Beatrice, Lavenus, Pierre, Dulmet, BernardYear:
2017
Language:
english
DOI:
10.1109/FCS.2017.8088851
File:
PDF, 484 KB
english, 2017