[IEEE 2017 22nd Microoptics Conference (MOC) - Tokyo (2017.11.19-2017.11.22)] 2017 22nd Microoptics Conference (MOC) - MEMS based micromirror arrays
Hillmer, Hartmut, Tatzel, Andreas, Al-Qargholi, Basim, Khan, Muhammad Mohsin, Akhundzada, SapidaYear:
2017
Language:
english
DOI:
10.23919/MOC.2017.8244516
File:
PDF, 769 KB
english, 2017