Improving the design of moving electrode in MEMS RR-type...

Improving the design of moving electrode in MEMS RR-type gyro

Evstifeev, M. I., Eliseev, D. P.
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Volume:
8
Language:
english
Journal:
Gyroscopy and Navigation
DOI:
10.1134/S2075108717040046
Date:
October, 2017
File:
PDF, 1.12 MB
english, 2017
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