Experimental investigations on nanogrinding of RB-SiC...

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Materials and Manufacturing Processes 2018 / 01

Experimental investigations on nanogrinding of RB-SiC wafers

Feng, Guang, Liu, Qiuzu, Guo, Wenliang, Xin, Yupeng, Liang, Qunlong
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Language:
english
Journal:
Materials and Manufacturing Processes
DOI:
10.1080/10426914.2018.1424906
Date:
January, 2018
File:
PDF, 1.78 MB
english, 2018
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