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Development of a simple, low cost, indirect ion beam fluence measurement system for ion implanters, accelerators
Suresh, K., Balaji, S., Saravanan, K., Navas, J., David, C., Panigrahi, B.K.Volume:
13
Language:
english
Journal:
Journal of Instrumentation
DOI:
10.1088/1748-0221/13/02/P02033
Date:
February, 2018
File:
PDF, 2.30 MB
english, 2018