Electron behaviors in afterglow of synchronized dc-imposed pulsed fluorocarbon-based plasmas
Ueyama, Toshinari, Fukunaga, Yusuke, Tsutsumi, Takayoshi, Takeda, Keigo, Kondo, Hiroki, Ishikawa, Kenji, Sekine, Makoto, Iwata, Manabu, Ohya, Yoshinobu, Sugai, Hideo, Hori, MasaruVolume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.06HC03
Date:
June, 2017
File:
PDF, 1.56 MB
english, 2017