Electrical and thermal properties of Cu-Ta films prepared...

Applied Surface Science 2018 / 06 Vol. 443

Electrical and thermal properties of Cu-Ta films prepared by magnetron sputtering

Qin, Wen, Fu, Licai, Zhu, Jiajun, Yang, Wulin, Sang, Jianquan, Li, Deyi, Zhou, Lingping
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Volume:
443
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2018.02.262
Date:
June, 2018
File:
PDF, 1.27 MB
english, 2018
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