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Mechanical characteristics of hydrogen-implanted crystalline silicon after post-implantation annealing
To, Suet, Jelenković, Emil V., Goncharova, Lyudmila V., Wong, Sing FaiLanguage:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.02.028
Date:
February, 2018
File:
PDF, 707 KB
english, 2018