[IEEE 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2017.5.15-2017.5.18)] 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Practical aspects of TMU based analysis for scatterometry model referencing AM: Advanced metrology
Hartig, Carsten, Urbanowicz, Adam M., Vaid, Alok, Ebersbach, Peter, Fischer, Daniel, Melzer, Robert, Sanchez, Francisco, Mezerette, David, Katz, Yinon, Sendelbach, MatthewYear:
2017
Language:
english
DOI:
10.1109/asmc.2017.7969194
File:
PDF, 669 KB
english, 2017