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Systematic investigation of the reactive ion beam sputter deposition process of SiO2
Mateev, Maria, Lautenschläger, Thomas, Spemann, Daniel, Finzel, Annemarie, Gerlach, Jürgen W., Frost, Frank, Bundesmann, CarstenVolume:
91
Language:
english
Journal:
The European Physical Journal B
DOI:
10.1140/epjb/e2018-80453-x
Date:
February, 2018
File:
PDF, 1.01 MB
english, 2018