Optimization of RF Magnetron Sputtering Process Parameters...

Advanced Materials Research 2015 / 6 Vol. 1109

Optimization of RF Magnetron Sputtering Process Parameters Based on Genetic Algorithm and Neural Network

Mohd Sabri, Norlina, Md Sin, Nor Diyana, Puteh, Mazidah, Rusop, Mohamad
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Volume:
1109
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.1109.481
Date:
June, 2015
File:
PDF, 199 KB
english, 2015
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