Kerfless epitaxial silicon wafers with 7 ms carrier...

Japanese Journal of Applied Physics 2018 / 04 Vol. 57; Iss. 4

Kerfless epitaxial silicon wafers with 7 ms carrier lifetimes and a wide lift-off process window

Gemmel, Catherin, Hensen, Jan, David, Lasse, Kajari-Schröder, Sarah, Brendel, Rolf
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Volume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.041301
Date:
April, 2018
File:
PDF, 744 KB
english, 2018
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