Blister formation in ZrN/SiN multilayers after He...

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Surface and Coatings Technology 2018 / 2

Blister formation in ZrN/SiN multilayers after He irradiation

Uglov, V.V., Abadias, G., Zlotski, S.V., Kvasov, N.T., Saladukhin, I.A., Malashevih, A.A.
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Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2018.02.095
Date:
February, 2018
File:
PDF, 8.10 MB
english, 2018
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