Seamless tool fabrication for roll-to-roll-microreplication

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Microelectronic Engineering 2018 / 2

Seamless tool fabrication for roll-to-roll-microreplication

Striegel, A., Schneider, M., Schneider, N., Benkel, Ch., Worgull, M.
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Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2018.02.022
Date:
February, 2018
File:
PDF, 1.23 MB
english, 2018
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