Etching damage and its recovery by soft X-ray irradiation...

Journal of Applied Physics 2013 / 03 Vol. 113; Iss. 12

Etching damage and its recovery by soft X-ray irradiation observed in soft X-ray absorption spectra of TiO 2 thin film

Niibe, Masahito, Sano, Keiji, Kotaka, Takuya, Kawakami, Retsuo, Tominaga, Kikuo, Nakano, Yoshitaka
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Volume:
113
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4798301
Date:
March, 2013
File:
PDF, 633 KB
english, 2013
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