Virtual design and optimization studies of industrial...

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Journal of Micromechanics and Microengineering 2018 / 02

Virtual design and optimization studies of industrial silicon microphones applying tailored system-level modeling

Kuenzig, Thomas, Krumbein, Ulrich, Schrag, Gabriele, Dehe, Alfons
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Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aab0d7
Date:
February, 2018
File:
PDF, 5.01 MB
english, 2018
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