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Microsystem Technologies 2018 / 3

Design and fabrication of high performance condenser microphone using C-slotted diaphragm

Azizollah Ganji, Bahram, Babaei Sedaghat, Sedighe, Roncaglia, Alberto, Belsito, Luca
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-3816-3
Date:
March, 2018
File:
PDF, 1.88 MB
english, 2018
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