Fast and Reliable Measurement of Thin Film Thickness Profile Based on Wavelet Transform in Spectrally Resolved White-Light Interferometry
Kim, Min-Gab, Pahk, Heui-JaeVolume:
19
Language:
english
Journal:
International Journal of Precision Engineering and Manufacturing
DOI:
10.1007/s12541-018-0024-0
Date:
February, 2018
File:
PDF, 558 KB
english, 2018