Application of focused ion beam for the fabrication of AFM...

IOP Conference Series Materials Science and Engineering 2017 / 10 Vol. 256

Application of focused ion beam for the fabrication of AFM probes

Kolomiytsev, A S, Lisitsyn, S A, Smirnov, V A, Fedotov, A A, Varzarev, Yu N
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Volume:
256
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/256/1/012007
Date:
October, 2017
File:
PDF, 565 KB
english, 2017
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