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Control of growth and structure of Ag films by the driving frequency of magnetron sputtering
YANG, Peifang, YE, Chao, WANG, Xiangying, GUO, Jiamin, ZHANG, SuVolume:
19
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/2058-6272/aa6619
Date:
August, 2017
File:
PDF, 2.72 MB
english, 2017