Control of growth and structure of Ag films by the driving...

Control of growth and structure of Ag films by the driving frequency of magnetron sputtering

YANG, Peifang, YE, Chao, WANG, Xiangying, GUO, Jiamin, ZHANG, Su
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Volume:
19
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/2058-6272/aa6619
Date:
August, 2017
File:
PDF, 2.72 MB
english, 2017
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