Ion Energy Control and Its Applicability to Plasma Enhanced Atomic Layer Deposition for Synthesizing Titanium Dioxide Films
Iwashita, Shinya, Denpoh, Kazuki, Kagaya, Munehito, Kikuchi, Takamichi, Noro, Naotaka, Hasegawa, Toshio, Moriya, Tsuyoshi, Uedono, AkiraLanguage:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.03.001
Date:
March, 2018
File:
PDF, 635 KB
english, 2018