Ga-doped ZnO films magnetron sputtered at ultralow...

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Thin Solid Films 2018 / 3

Ga-doped ZnO films magnetron sputtered at ultralow discharge voltages: Significance of controlling defect generation

Chen, Yuyun, Meng, Fanping, Ge, Fangfang, Xu, Genbao, Huang, Feng
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.03.019
Date:
March, 2018
File:
PDF, 7.50 MB
english, 2018
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