Nonlinear behaviour of electrically actuated...

Mechanical Systems and Signal Processing 2018 / 09 Vol. 109

Nonlinear behaviour of electrically actuated microplate-based MEMS resonators

Ghayesh, Mergen H., Farokhi, Hamed
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Volume:
109
Language:
english
Journal:
Mechanical Systems and Signal Processing
DOI:
10.1016/j.ymssp.2017.11.043
Date:
September, 2018
File:
PDF, 2.31 MB
english, 2018
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