Fabrication of Uniform Wrinkled Silica Nanoparticles and...

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ACS Applied Materials & Interfaces 2018 / 03

Fabrication of Uniform Wrinkled Silica Nanoparticles and their Application to Abrasives in Chemical Mechanical Planarization

Ryu, Jaehoon, Kim, Wookhwan, Yun, Juyoung, Lee, Kisu, Lee, Jungsup, Yu, Haejun, Kim, Jae Hyun, Kim, Jae Jeong, Jang, Jyongsik
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.7b15952
Date:
March, 2018
File:
PDF, 5.62 MB
english, 2018
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