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[IEEE 2017 IEEE International Young Scientists Forum on Applied Physics and Engineering (YSF) - Lviv, Ukraine (2017.10.17-2017.10.20)] 2017 IEEE International Young Scientists Forum on Applied Physics and Engineering (YSF) - Adopting of DC magnetron sputtering method for preparing semiconductor films
Kirichenko, M. V., Zaitsev, R. V., Dobrozhan, A. I., Khrypunov, G. S., Kharchenko, M. M.Year:
2017
Language:
english
DOI:
10.1109/ysf.2017.8126600
File:
PDF, 238 KB
english, 2017