[ASME ASME 2016 International Mechanical Engineering Congress and Exposition - Phoenix, Arizona, USA (Friday 11 November 2016)] Volume 10: Micro- and Nano-Systems Engineering and Packaging - Parametric Study of the Effect of Particles and Contaminants on the Static Response of a MEMS System
Vutla, Srinivasa Rao, Regalla, Srinivasa Prakash, Ramaswamy, Kannan, Pattnaik, Prasant Kumar, Mandalika Bala, SrinivasYear:
2016
Language:
english
DOI:
10.1115/IMECE2016-66002
File:
PDF, 2.74 MB
english, 2016