Discharge runaway in high power impulse magnetron sputtering of carbon: the effect of gas pressure, composition and target peak voltage
Vitelaru, Catalin, Aijaz, Asim, Parau, Anca Constantina, Kiss, Adrian E, Sobetkii, Arcadie, Kubart, TomasLanguage:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aab590
Date:
March, 2018
File:
PDF, 1.08 MB
english, 2018