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[IEEE 2017 Conference on Lasers and Electro-Optics - Pacific Rim (CLEO-PR) - Singapore (2017.7.31-2017.8.4)] 2017 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR) - Design and fabrication of a crossed grating with multiple zero-reference marks for surface encoders
Mao, Xinyu, Zeng, LijiangYear:
2017
Language:
english
DOI:
10.1109/CLEOPR.2017.8118725
File:
PDF, 490 KB
english, 2017