![](/img/cover-not-exists.png)
[IEEE 2017 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR) - Singapore, Singapore (2017.7.31-2017.8.4)] 2017 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR) - Surface characterization of a micro-patterned sample using simultaneous dual-wavelength interferometry with compensation of chromatic aberration
Ibrahim, Dahi Ghareab AbdelsalamYear:
2017
Language:
english
DOI:
10.1109/CLEOPR.2017.8119101
File:
PDF, 627 KB
english, 2017