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[IEEE 2017 13th IEEE Conference on Automation Science and Engineering (CASE 2017) - Xi'an (2017.8.20-2017.8.23)] 2017 13th IEEE Conference on Automation Science and Engineering (CASE) - Big data analytic for multivariate fault detection and classification in semiconductor manufacturing
Chen, Ying-Jen, Wang, Bo-Cheng, Wu, Jei-Zheng, Wu, Yi-Chia, Chien, Chen-FuYear:
2017
Language:
english
DOI:
10.1109/COASE.2017.8256190
File:
PDF, 590 KB
english, 2017