Ultrathin SiGe Shell Channel p-Type FinFET on Bulk Si for Sub-10-nm Technology Nodes
Yu, Eunseon, Lee, Won-Jun, Jung, Jongwan, Cho, SeongjaeYear:
2018
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2018.2808764
File:
PDF, 2.56 MB
english, 2018