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[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung, Taiwan (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Micro shell resonator with T-shape masses fabricated by micro blow-torching using whirling platform
Li, Wei, Hou, Zhanqiang, Lu, Kun, Shi, Yan, Xiao, Dingbang, Wu, Yulie, Wu, XuezhongYear:
2017
Language:
english
DOI:
10.1109/TRANSDUCERS.2017.7994441
File:
PDF, 1.13 MB
english, 2017